Trillium Blog Upgrade your LAM etch chillers to modern tech!

Anyone who uses legacy LAM Etchers knows that their chillers are critical in ensuring high wafer yield for the fab. Sadly, the primary manufacturers for the chillers on these systems are no longer supporting this older technology. While we do our best to repair these old chillers, it is getting harder and harder to keep them going. Added [...]The post Upgrade your LAM etch chillers to modern tech! appeared first on Trillium.